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LI Jing-Feng

Prof. Jing-Feng Li is Changjiang Scholars Distinguished Professor of  Tsinghua University, Deputy Director of Tsinghua University-Toyota Research Center, and a guest professor of Tohoku University. His research interests include ferroelectric/piezoelectric and thermoelectric materials and MEMS-based microfabrication technology. Prof. Li has published four books and 580+ papers in prestigious journals including Science and Nature Materials and has been invited to give >100 plenary/keynote/invited lectures at international conferences/symposia/workshops. Prof. Li now serves as Editor-in-Chief for Journal of Materiomics and associate Editor-in-Chief for Journal of the Chinese Ceramic Society, Foreign Fellow of Engineering Academy of Japan, Fellow of the American Ceramic Society, a board member of International Thermoelectric Society. He is Highly Cited Researcher and received IEEE Ferroelectrics Recognition Award in 2024.

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Education Background

1991, Ph. D, Tohoku University, Japan

1988, M. S., Tohoku University, Japan

1984, B. S., Huazhong University of Science and Technology, China

Work Resume

2013-2016, Vice Dean, School of Materials Science and Engineering

2009-, “Changjiang Scholar” distinguished professor

2006- , Deputy director, Tsinghua-Toyota Research Center

2004-2012, Vice Department Chair, MSE department

2002-, Professor, Tsinghua University

1997-2002, Associate Professor, Tohoku University, Japan

1992-1997, Assistant Professor, Tohoku University, Japan

1991-1992, Researcher, Nihon Ceratec Co. Ltd., Japan

Research Field

(1) Piezoelectric ceramics and composites, piezoelectric films for MEMS applications;

(2) Thermoelectric materials and microdevices for energy conversion;

(3) MEMS-based microfabrication processing of piezoelectric and thermoelectric materials.

Awards And Honors

(1) IEEE Ferroelectrics Recognition Award, 2024

(2) The second prize of Natural Science Award of Beijing Science and Technology Award, 2023

(3) Foreign Fellow, Engineering Academy of Japan, 2022

(4) Guest Professor, Tohoku University, 2021

(5) Fellow, American Ceramic Society, 2020

(6) Board Member, International Thermoelectric Society, 2019

(7) Full Member, International Institute for The Science of Sintering, 2019

(8) The first prize for basic research of Chinese Ceramic Society and Chinese Building Materials Association, 2019

(9) Outstanding author of Chinese Science, 2019

(10) Journal of the American Ceramic Society Loyalty Award, 2014

(11) Beijing Science and Technology Award (The Third Prize), Beijing City, 2011

(12) Beijing Science and Technology Award (The Third Prize), Beijing City, 2010

(13) Excellent Graduate Course Award, Tsinghua University, 2010

(14) Changjiang Distinguish Professor, 2008

(15) Tsinghua University Good Educator Award, 2005

(16) National Science Fund for Distinguished Young Scholars, National Natural Science Foundation of China, 2003

(17) Harada Award, from Japan Kinzoku Jyoseikai (foundation), 1998

(18) Young Researcher Award, from Japan Institute of Metals, 1995

Academic Achievements

Book & Chapter

1) Jing-Feng Li, Lead-free piezoelectric Materials, Wiley, 2021, https://www.wiley.com/en-us/Lead+Free+Piezoelectric+Materials-p-9783527817054

2) Jing-Feng Li, Min Zhou, Jun Pei, Thermoelectric Materials and Processing Technologies, Science Press, 2023,

3) J.B. Li and J.-F. LI: New Energy Materials and Application (in Chinese). Beijing: Tsinghua University Press, (2005)

4) Y. Tang and J.-F. Li, Introduction to New Materials (in Chinese), Metallurgy Industrial Press, (2004)


Review Articles:

1) J. Roedel, J.-F. Li, Lead-free piezoceramics: Status and perspectives, MRS Bulletin, 43(2018)576-580.

2) J.-F. Li, K. Wang, F.-Y. Zhu, L.-Q. Cheng and F.-Z. Yao, (K, Na)NbO3-Based Lead-Free Piezoceramics: Fundamental Aspects, Processing Technologies and Remaining Challenges, Journal of the American Ceramic Society, 96 (2013)3677-3696. (Feature/Review article, cover page)

3) J.-F. Li, W. S. Liu, L.-D. Zhao, M. Zhou, High-performance nanostructured thermoelectric materials, NPG Asia Materials, 2 (2010) 152-158. (Review).

4) J.-F. Li, Y. Pan, C.-F. Wu, F.-H. Sun, T.-R. Wei, Processing of advanced thermoelectric materials, Science China Technological Science, 60(2017)1347. (Review)


Selected Research papers (for a complete set of publications, please visit http://www.researcherid.com/rid/D-2770-2014):

1) L. Shu, X. Shi, X. Zhang, Z. Yang, W. Li, Y. P. Ma, Y.-X. Liu, L. S. Liu, Y.-Y.-S. Cheng, L. Wei, H. Huang, S. J. Zhang, J.-F. Li, Partitioning polar-slush strategy in relaxors leads to large energy-storage capability, Science, 385(2024)204-209.

2) H. H. Hu, Y. W. Ju, J. C. Yu, Z. C. Wang, J. Pei, H.-C. Thong, J.-W. Li, B. W. Cai, F. M. Liu, Z. R. Han, B. Su, H.-L. Zhuang, Y. L. Jiang, H. Z. Li, Q. Li, H. J. Zhao, B.-P. Zhang, J. Zhu, J.-F. Li, Highly stabilized and efficient thermoelectric copper selenide, Nature Materials, 23(2024)527-534. (highlighted by Science, Nature Materials, Nature Review Materials)

3) J. C. Yu, X. D. Liu, H. H. Hu, Y. L. Jiang, H.-L. Zhuang, H. Li, B. Su, J.-W. Li, Z. R. Han, Z. Q. Yang, L. Chen, K. Hayashi, Y. Miyazaki, B. L. Mehdi, J.-F. Li, Ultralow thermal conductivity and high ZT of Cu2Se-based thermoelectric materials mediated by TiO2-n nanoclusters, Joule, 8(2024)2652-2666.

4) H. H. Hu, B. Su, X. D. Liu, H.-C. Thong, Y. L. Jiang, H. Z. Li, J.-W. Li, H.-L. Zhuang, Z. R. Han, J. C. Yu. B. L. Mehdi, J.-F. Li, Chemical bond engineering toward extraordinary power factor and service stability in thermoelectric copper selenide, Joule, 8(2024)416-429.

5) H.-L. Zhuang, B. Cai, Y. Pan, B. Su, Y. L. Jiang, J. Pei, F. M. Liu, H. H. Hu, J. Y. C. Yu, J.-W. Li, Z. Q. Wang, Z. R. Han, H. Li, C. Wang, J.-F. Li, Strong and efficient bismuth telluride-based thermoelectrics for Peltier microcoolers, National Science Review, 11(2024) nwae329.

6) Y. Jiang, H.-L. Zhuang, B.Su, J. Yu, Z. Han, H. H. Hu, H. Li, J. F. Dong, J.-W. Li, C. Wang, Z.-H. Ge, J. Feng, F.-H. Sun, J.-F. Li, Exceptional figure of merit achieved in boron-dispersed GeTe-based thermoelectric composites, Nature Communications, 15(2024)5915.

7) J.-W. Li, Z. J. Han, J. C. Yu, H.-L. Zhuang*, H. H. Hu, B. Su, H. Z. Li, Y. L. Jiang, L. Chen, W. S. Liu, Q. Zheng, J.-F. Li, Wide-temperature-range thermoelectric n-type Mg3(Sb,Bi)2 with high average and peak zT values, Nature Communications, 14(2023) 7428

8) B. C. Qin, D. Y. Wang, X. X. Liu, Y. X. Qin, J.-F. Dong, J. F. Luo, J.-W. Li, W. Liu, G. J. Tan, X. F. Tang, J.-F. Li, J. Q. He, L.-D. Zhao, Power generation and thermoelectric cooling enabled by momentum and energy multiband alignments, Science, 373(2021) 556.

9) L.-F. Zhu, S. Q. Deng, L. Zhao, G. Li, Q. Wang, L. Li, Y. K. Yan, H. Qi, B.-P. Zhang, J. Chen, J.-F. Li, Heterovalent-doping-enabled atom-displacement fluctuation leads to ultrahigh energy-storage density in AgNbO3-based multilayer capacitors, Nature Communications, 14(2023) 1166.

10) H. H. Hu. H. L. Zhuang, Y. L. Jiang, J. L. Shi, J.-W. Li, B. W. Cai, Z. R. Han, J. Pei, B. Su, Z.-H. Ge, B.-P. Zhang, J.-F. Li, Thermoelectric Cu12Sb4S13-Based Synthetic Minerals with a Sublimation-Derived Porous Network, Advanced Materials, 33(2021)2103633

11) J.-W. Li, W. S. Liu, W. Xu, H.-L. Zhuang, Z. Han, F. Jiang, P. Zhang, H. H. Hu, H. B. Gao, Y. L. Jiang, B. W. Cai, J. Pei, B. Su, Q. Li, K. Hayashi, H. Z. Li, Y. Miyazaki, X. Z. Cao, Q. Zheng, J.-F. Li, Bi-Deficiency Leading to High-Performance in Mg3(Sb,Bi)2-Based Thermoelectric Materials, Advanced Materials, 2023, 22209119

12) H. L. Zhuang, J. Pei, B. W. Cai, J. F. Dong, H. H. Hu, F. H. Sun, Y. Pan, G. J. Snyder, J.-F. Li, Thermoelectric Performance Enhancement in BiSbTe Alloy by Microstructure Modulation via Cyclic Spark Plasma Sintering with Liquid Phase, Advanced Functional Materials, 31(2021) 2009681.

13) L. S. Liu, K. Xu, Q. Li, J. Daniels, H. Zhou, J. Y. Li, J. Zhu, J. Seidel, J.-F. Li, Giant Domain Wall Conductivity in Self-Assembled BiFeO3 Nanocrystals, Advanced Functional Materials, 31(2021)2005876

14) Q. Liu, Y. C. Zhang, J. Gao, Z. Zhou, D. Yang, K.-Y. Lee, A. Studer, M. Hinterstein, K. Wang, X. W. Zhang, L. T. Li, J.-F. Li, Practical high-performance lead-free piezoelectrics: structural Flexibility beyond utilizing multiphase coexistence, National Science Review, 7(2020)355-365.

15) J. Pei, B. W. Cai, H.-L. Zhuang, J.-F. Li, Bi2Te3-based applied thermoelectric materials: research advances and new challenges, National Science Review, 7(2020)1856-1858.

16) W. He, D. Y. Wang, H. J. Wu, Y. Xiao, Y. Zhang, D. S. He, Y. Feng, Y.-J. Hao, J.-F. Dong, R. Chetty, L. J. Hao, D. F. Chen, J. F. Qin, Q. Yang, X. Li, J.-M. Song, Y. Zhu, W. Xu, C. Niu, X. Li, G. Wang, C. Lin, M. Ohta, S. J. Pennycook, J. Q. He, J.-F. Li, L.-D. Zhao, High thermoelectric performance in low-cost SnS0.91Se0.09 crystals, Science, 365[6460](2019) 1418

17) Y. Pan, Y. Qiu, I. Witting, I. T. Witting, L. G. Zhang, C. G. Fu, J.-W. Li, Y. Huang, F.-H. Sun, J. Q. He, G. J. Snyder, C. Felser, J.-F. Li, Synergistic modulation of mobility and thermal conductivity in (Bi,Sb)2Te3 towards high thermoelectric performance, Energy & Environmental Science, 12(2019)624-630.

18) J. F. Dong, F.-H. Sun, H. C. Tang, J. Pei, H.-L. Zhuang, H.-H. Hu, B.-P. Zhang, Y. Pan, J.-F. Li, Medium-temperature thermoelectric GeTe: vacancy suppression and band structure engineering leading to high performance, Energy & Environmental Science, 12(2019)1396-1403.

19) C. Chang, M. Wu, D. He, Y. Pei, C.-F. Wu, X. Wu, H.L. Yu, F.Y. Zhu, K. D. Wang, Y. Chen, L. Huang, J.-F. Li, J. Q. He, L.-D. Zhao, 3D charge and 2D phonon transports leading to extremely high out-of-plane ZT in n-type SnSe crystals, Science, 360(2018)778-783.

20) Q. Liu, Y. Zhang, J. Gao, Z. Zhou, H. Wang, K. Wang, X. W. Zhang, L. T. Li, and J.-F. Li, High-Performance Lead-free Piezoelectrics with Local Structural Heterogeneity, Energy & Environmental Science, 11(2018)3531-3539.

21) Y. Pan, U. Aydemir, J. A. Grovogui, I. T. Witting, R. Hanus, Y. Xu, J. Wu, C.-F. Wu, F.-H. Sun, H.-L. Zhuang, J.-F. Dong, J.-F. Li, V. P. Dravid, G. J. Snyder, Melt-Centrifuged (Bi,Sb)2Te3: Engineering Microstructure toward High Thermoelectric Efficiency, Advanced Materials, 30(2018)1802016.

22) H. C. Tang, F.-H. Sun, J.-F. Dong, Asfandiyar, H.-L. Zhuang, Y. Pan, J.-F. Li, Graphene network in copper sulfide leading to enhanced thermoelectric properties and thermal stability, Nano Energy, 49(2018)267-273.

23) W., Wei, C. Chang, T. Yang, J. Liu, H. C. Tang, J. Zhang, Y. S. Li, Feng Xu, Z. D. Zhang, J.-F. Li, G. D. Tang, Achieving High Thermoelectric Figure of Merit in Polycrystalline SnSe via Introducing Sn Vacancies, Journal of the American Chemical Society, 140(2018) 499-505.

24) Q. Liu, J.-F. Li, L. Zhao, Y. C. Zhang, J. Gao, W. Sun, K. Wang, L. T. Li, Niobate-based lead-free piezoceramics: a diffused phase transition boundary leading to temperature-insensitive high piezoelectric voltage coefficients, Journal of Materials Chemistry C, 6(2018)1116-1125.

25) L. Zhao, Q. Liu, J. Gao, S. J. Zhang, J.-F. Li, Lead-Free Antiferroelectric Silver Niobate Tantalate with High Energy Storage Performance, Advanced Materials, 29(2017)1701824.

26) M.-H. Zhang, K. Wang, Y.-J. Du, G. Dai, W. Sun, G. Li, D. Hu, H. C. Thong, C. L. Zhao, X.-Q. Xi, Z.-X. Yue, J.-F. Li, High and Temperature-Insensitive Piezoelectric Strain in Alkali Niobate Lead-free Perovskite, Journal of the American Chemical Society, 139(2017) 3889-3895.

27) C.-F. Wu, T.-R. Wei, F.-H. Sun and J.-F. Li, Nanoporous PbSe–SiO2 Thermoelectric Composites, Advanced Science, 4(2017)1700199

28) Y. Pan, U.t Aydemir, F.-H. Sun, C.-F. Wu, T. C. Chasapis, G. J. Snyder and J.-F. Li, Self-Tuning n-Type Bi2(Te,Se)3/SiC Thermoelectric Nanocomposites to Realize High Performances up to 300 °C, Advanced Science, 4(2017)1700259.

29) J. Luo, W. Sun, Z. Zhou, H.-Y. Lee, K. Wang, F. Y. Zhu, Y. Bai, Z. J. Wang and J.-F. Li, Monoclinic (K,Na)NbO3 Ferroelectric Phase in Epitaxial Films, Advanced Electronic Materials, 3(2017) 1700226 (cover page)

30) Z. L. Li, J.-F. Dong, F.-H. Sun, S. Hirono, J.-F. Li, Significant Enhancement of the Thermoelectric Performance of Higher Manganese Silicide by Incorporating MnTe Nanophase Derived from Te Nanowire, Chemistry of Materials, 29(2017)7378.

31) F.-Z. Yao, K. Wang, W. Jo, K. G. Webber, T. P. Comyn, J.-X. Ding, B. Xu, L.-Q. Cheng, M.-P. Zheng, Y.-D. Hou, J.-F. Li, Diffused phase transition boosts thermal stability of high-performance lead-free piezoelectrics, Advanced Functional Materials, 26(2016)1217-1224.

32) T.-R. Wei, G. Tan, X. Zhang, C.-F. Wu, J.-F. Li, V. P. Dravid, G. J. Snyder, M. G. Kanatzidis, Distinct Impact of Alkali-Ion Doping on Electrical Transport Properties of Thermoelectric p-type Polycrystalline SnSe, Journal of the American Chemical Society, 138(2016)8875-8882.

33) Y. Pan, J.-F. Li, Thermoelectric performance enhancement in n-type Bi2(TeSe)3 alloys owing to nanoscale inhomogeneity combined with a spark plasma textured-microstructure, NPG Asia Materials, 8(2016)e275.

34) W. Sun, J.-F. Li, Q. Yu, L.-Q. Cheng, Phase transition and piezoelectricity of sol-gel-processed Sm-doped BiFeO3 thin films on Pt(111)/Ti/SiO2/Si substrates, Journal of Materials Chemistry C, 3 (2015)2115-2122.

35) Y. Pan, T.-R. Wei,C.-F. Wu, J.-F. Li, Electrical and thermal transport properties of spark plasma sintered n-type Bi2Te3-xSex alloys: combined effect of point defect and Se content, Journal of Materials Chemistry C, 2(2015)17302-17306.

36) D. Wu, L.-D. Zhao, X. Tong, W. Li, L. J. Wu, Q. Tan, Y. L. Pei, L. Huang, J.-F. Li, Y. M. Zhu, M. G. Kanatzidis, J. G. He, JQ, Superior thermoelectric performance in PbTe-PbS pseudo-binary: extremely low thermal conductivity and modulated carrier concentration, Energy & Environmental Science, 8(2015) 2056-2068.

37) L.-D. Zhao, J. Q. He, D. Berardan, Y.-H. Lin, J.-F. Li, C.-W. Nan, N. Dragoe, BiCuSeO oxyselenides: new promising thermoelectric materials, Energy & Environmental Science, 7(2014)2900-2924

38) Z.-Y. Li and J.-F. Li, Fine-Grained and Nanostructured AgPbmSbTem+2 Alloys with High Thermoelectric Figure of Merit at Medium Temperature, Advanced Energy Materials, 4(2014)1300937.

39) Q. Tan, L-D. Zhao, J.-F. Li, C.-F. Wu, T.-R. Wei, Z.-B. Xing, M. G. Kanatzidis, Thermoelectrics with earth abundant elements: low thermal conductivity and high thermopower in doped SnS, Journal of Materials Chemistry A, 2(2014)17302-17306.

40) T.-R. Wei, H. Wang, Z. M. Gibbs, C.-F. Wu, G. J. Snyder, J.-F. Li, Thermoelectric properties of Sn-doped p-type Cu3SbSe4: a compound with large effective mass and small band gap, Journal of Materials Chemistry A, 2(2014)13527-13533.

41) L.-Q. Cheng, K. Wang, J.-F. Li, Y. M. Liu, J. Y. Li, Piezoelectricity of lead-free (K, Na)NbO3 nanoscale single crystals, Journal of Materials Chemistry C, 2(2014)9091-9098. (Front cover article).

42) Q. Yu, J.-F. Li, F.-Y. Zhu, J.-Y. Li, Domain evolution of tetragonal Pb(ZrxTi1-x) O-3 piezoelectric thin films on SrTiO3 (100) surfaces: combined effects of misfit strain and Zr/Ti ratio, Journal of Materials Chemistry C, 2(2014)5836-5841.

43) K. Wang, F.-Z. Yao, W. Jo, D. Gobeljic, V. V. Shvartsman, D. C. Lupascu, J.-F. Li, J. Rodel, Temperature-Insensitive (K, Na)NbO3-Based Lead-free Piezoactuator Ceramics, Advanced Functional Materials, 23, 4079-4086 (2013)

44) J. H. Li, Q. Tan, J.-F. Li, et. al., BiSbTe-Based Nanocomposites with High ZT: The SiC Nanodispersion on Thermoelectric Properties, Advanced Functional Materials, 23 (2013) 4317-4323.

45) F. Li, J.-F. Li, L.-D. Zhao, K. Xiang, Y. Liu, B.-P. Zhang, Y.-H. Lin, C.-W. Nan, H.-M. Zhu, Polycrystalline BiCuSeO oxide as a potential thermoelectric material, Energy & Environmental Science, 5 (2012) 7188-7195.

46) Y. Xu, Q. Yu, J.-F. Li, A facile method to fabricate vertically aligned (K, Na)NbO3 lead-free piezoelectric nanorods, Journal of Materials Chemistry, 22(2012)23221.

47) Y. Liu, L.-D. Zhao, Y. Liu, J. Lan, W. Xu, F. Li, B.-P. Zhang, D. Berardan, N. Dragoe, Y.-H. Lin, C.-W. Nan, J.-F. Li, and H. Zhu, Remarkable Enhancement in Thermoelectric Performance of BiCuSeO by Cu Deficiencies, Journal of the American Chemical Society, 133, (2011) 20112-20115

48) D.-W. Liu, J.-F. Li, Microfabrication of thermoelectric modules by patterned electrodeposition using a multi-channel glass template, Journal of Solid State Electrochemistry, 15[3] 479-484 (2011).

49) J.-F. Li, Z.-X. Zhu, and F.-P. Lai, Thickness-Dependent Phase Transition and Piezoelectric Response in Textured Nb-Doped Pb(Zr0.52Ti0.48)O3 Thin Films, J. Phys. Chem. C, 114, 41, (2010)17796-17801.

50) K. Wang, J.-F. Li, Domain Engineering of Lead-free Li-modified (K, Na)NbO3 Polycrystals with Highly Enhanced Piezoelectricity, Advanced Functional Materials, 20(2010) 1924-1929.

51) Z.-X. Zhu, J.-F. Li, Y. Y. Liu, J. Y. Li, Shifting of morphotropic phase boundary and superior piezoelectric response in Nb-doped Pb(Zr,Ti)O3 epitaxial thin films, Acta Materialia, 57 (2009) 4288–4295.

52) M. Zhou, J.-F. Li, T. Kita, Nanostructured AgPbmSbTem+2 system bulk materials with enhanced thermoelectric performance, Journal of the American Chemical Society, 130 (2008) 4527-4532.

53) K. Wang, J.-F. Li, Analysis of crystallographic evolution in (Na,K)NbO3-based lead-free piezoceramics by x-ray diffraction, Applied Physics Letters, 91(2007) 262902.

54) J.-F. Li, K. Wang, B. P. Zhang, L. M. Zhang, Ferroelectric and piezoelectric properties of fine-grained Na0.5K0.5NbO3 lead-free piezoelectric ceramics prepared by spark plasma sintering, Journal of the American Ceramic Society 89 (2006) 706.

55) H. Wang, J.-F. Li, C.-W. Nan, M. Zhou, W.S. Liu, B.-P. Zhang and T. Kita, High-Performance Ag0.8Pb18+xSbTe20 thermoelectric bulk materials fabricated by mechanical alloying and spark plasma sintering, Applied Physics Letters, 88 (9) 092104 (2006).

56) J.-F. Li, K. Wang, B. P. Zhang, L. M. Zhang, Ferroelectric and piezoelectric properties of fine-grained Na0.5K0.5NbO3 lead-free piezoelectric ceramics prepared by spark plasma sintering, Journal of the American Ceramic Society 89 (2006) 706-709.

57) Y. H. Zhen, J.-F. Li, Normal sintering of (K,Na)NbO3-based ceramics: Influence of sintering temperature on densification, microstructure, and electrical properties, Journal of the American Ceramic Society, 89 (2006)3669-3675

58) W. Gong, J.-F. Li, C.-E Peng, Z. Gui and L. T. Li, In-Plane Aligned Pb(Zr, Ti)O3 Microbelts Fabricated by Near Migration and Restricted Growth, Advanced Materials, 17 (2005)1952-1956.

59) W. Gong, J.-F. Li*, X. C. Chu, Z. L. Gui and L. T. Li , Combined effect of preferential orientation and Zr/Ti atomic ratio on electrical properties of Pb(ZrxTi1-x)O3 thin films, Journal of Applied Physics, 96 [1](2004) 590-595.

60) J.-F. Li, S. Tanaka, T. Umeki, S. Sugimoto, M. Esashi, R. Watanabe, Microfabrication of Thermoelectric Microdevices by Silicon Molding Process, SENSORS AND ACTUATORS A-PHYSICAL 108 (2003)97-102.

61) J.-F. Li, K. Takagi, N. Terakubo, R. Watanabe, Electrical and mechanical properties of piezoelectric ceramic/metal composites in the Pb(Zr,Ti)O3/Pt system, Applied Physics Letters, 79, (2001)2441-2443.

62) J.-F. Li, W. Pan, F. Sato, R. Watanabe, Mechanical Properties of Polycrystalline Ti3SiC2 at Ambient and Elevated Temperatures, Acta Materialia, 49,937-945 (2001).

63) S. Wang, J.-F. Li, K. Wakabayashi, M. Esashi, R. Watanabe, Lost Silicon Mold Process for PZT Microstructures, Advanced Materials 11 (1999)873-876

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